Co2 bubbler
Introduction:
ADT 947 Co2 Bubbler Inline Injector (CO2 Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.
System highlights
- Tabletop design
- Back film removal & collection mechanism
- Heating stage plate (temperature controlled)
- Built-in vacuum generator
- Customizable
- Handles all tape types and frame types (up to 300mm)
- Robust design
Options
- Extended resistivity setting range
- Alarm Buzzer
Specification:
