Co2 bubbler


ADT 947 Co2 Bubbler Inline Injector (CO2 Bubbler) is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

System highlights

  • Tabletop design
  • Back film removal & collection mechanism
  • Heating stage plate (temperature controlled)
  • Built-in vacuum generator
  • Customizable
  • Handles all tape types and frame types (up to 300mm)
  • Robust design


  • Extended resistivity setting range
  • Alarm Buzzer


Category: ADT, Peripheral Equipment