Wafer Cleaner
Introduction:
ADT Model 977 Wafer Cleaner is designed for cleaning workpieces after dicing. It is equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements
- Superb performance (cleaning quality)
- Versatility (add-on options)
- Compact
- Robust design
- Enhanced cleaning process
- Process monitoring
- Customization
Options:
- Built-in exhaust blower
- Ionizer
- IR heater
- Surfactant nozzle and tank
- Water resistivity measurement
- CO2 injector
- Tape-less vacuum holding
- Special customized solutions
